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Process techniques study of integrated circuits Interim scientific report no. 1Advanced processing techniques for fabricating high reliability silicon integrated circuits, and failure mode studies
Document ID
19680022779
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Meinhard, J. E. (North American Rockwell Corp. Anaheim, CA, United States)
Date Acquired
August 4, 2013
Publication Date
May 1, 1968
Subject Category
Electronic Equipment
Report/Patent Number
NASA-CR-86091
C5-1471.12/501
Report Number: NASA-CR-86091
Report Number: C5-1471.12/501
Accession Number
68N32251
Funding Number(s)
CONTRACT_GRANT: NAS12-4
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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