NASA Logo

NTRS

NTRS - NASA Technical Reports Server

Collections About News Help Login

Press Enter or click the Search button to begin your search.

Back to Results
Process techniques study of integrated circuits Final scientific reportSurface impurity and structural defect analysis on thermally grown silicon oxide integrated circuit
Document ID
19710014239
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Brandewie, J. V. (North American Rockwell Corp. Anaheim, CA, United States)
Scott, C. W. (North American Rockwell Corp. Anaheim, CA, United States)
Date Acquired
August 6, 2013
Publication Date
June 1, 1970
Subject Category
Electronics
Report/Patent Number
NASA-CR-117904
Report Number: NASA-CR-117904
Accession Number
71N23715
Funding Number(s)
CONTRACT_GRANT: NAS12-4
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

Related Records

There are no records associated with this record.
No Preview Available