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Reliability studies in semiconductor fabricationProfiling procedures including computer program (OLS) for measuring junction depth in anodic oxidation - semiconductor fabrication reliability studies
Document ID
19710025430
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Date Acquired
August 6, 2013
Publication Date
January 1, 1971
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-119800
Report Number: NASA-CR-119800
Accession Number
71N34906
Funding Number(s)
CONTRACT_GRANT: NGR-05-010-041
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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