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Optical scanning tests of complex CMOS microcircuitsThe new test method was based on the use of a raster-scanned optical stimulus in combination with special electrical test procedures. The raster-scanned optical stimulus was provided by an optical spot scanner, an instrument that combines a scanning optical microscope with electronic instrumentation to process and display the electric photoresponse signal induced in a device that is being tested.
Document ID
19780005383
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Levy, M. E. (Hughes Aircraft Co. Culver City, CA, United States)
Erickson, J. J. (Hughes Aircraft Co. Culver City, CA, United States)
Date Acquired
September 3, 2013
Publication Date
October 1, 1977
Subject Category
Electronics And Electrical Engineering
Report/Patent Number
P77-396
NASA-CR-150474
Report Number: P77-396
Report Number: NASA-CR-150474
Accession Number
78N13326
Funding Number(s)
CONTRACT_GRANT: NAS8-31239
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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