Binning for IC Quality: Experimental Studies on the SEMATECH Data

The earlier smaller bipolar study did not provide a high enough bin 0 population to directly observe test escapes and thereby estimate defect levels for the best bin. Results presented here indicate that the best bin can be reasonably expected to show a 2 - 5 factor improvement in defect levels over the average for the lot for moderate to high yields (the overall yield for these experiments was approximately 65%). The experiments also confirm the dependence of the best bin quality on test transparency. The defect level improvement is poorer for the case Of IDDQ escapes where the tests applied had a much higher escape rate. Overall experimental results are consistent with analytical projections for typical values of the clustering parameter in [9]. The final version of this paper will include extensive analysis to validate the analytical models based on this data.