Uncertainty Estimates for Fitting Zernike Polynomials to Discrete Data

Zernike polynomials are a widely used metric in modern optical analysis. They conveniently represent surfaces as a series of weighted terms corresponding to various optical aberrations. Ideally, each term is independent of others in the series, but Zernike polynomials lose this property when working with sets of discrete data. This gives rise to uncertainty in each polynomial’s actual contribution and affects metrology and simulation estimates of their relative weights. Several factors influencing these estimates are the number and arrangement of sample locations, the method for calculating the weights, and the total number of Zernike terms used in the calculation. Discussed is the uncertainty associated with linear regression using random sampling. Other topics reviewed are complex Zernike polynomials and vector spaces of functions.