System for Long-Duration Electrical Testing of SiC IC Generation 12 Chips at 500 °C

The system described in this report is an improved testing rig designed to enhance measurement flexibility, provide a compact oven footprint, and reduce costs for parallel oven-testing silicon carbide (SiC) integrated circuit devices at 500 °C for long durations (greater than 100 h). The testing rig design was characterized in terms of the ovens’ internal and external temperatures, system noise, and the leakage properties of their substrate/inner boards, where the devices under test (DUTs) reside. The test rig employs a National Instruments (NI) Peripheral Component Interconnect eXtensions for Instrumentation (PXI) measurement system, room-temperature pin-switching/customizing boards, and high-temperature compact ovens.