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Development of ion implantation techniques for microelectronicsIon implantation process for fabricating active devices in high bandgap semiconductor materials for high temperature operation
Document ID
19690015061
Acquisition Source
Legacy CDMS
Document Type
Contractor Report (CR)
Authors
Dunlap, H. L. (Hughes Research Labs. Malibu, CA, United States)
Hunsperger, R. G. (Hughes Research Labs. Malibu, CA, United States)
Marsh, O. J. (Hughes Research Labs. Malibu, CA, United States)
Date Acquired
August 4, 2013
Publication Date
October 1, 1968
Publication Information
Publisher: NASA. ELECTRONICS RESEARCH CENTER
Subject Category
Physics, Solid-State
Report/Patent Number
NASA-CR-86142
Report Number: NASA-CR-86142
Accession Number
69N24439
Funding Number(s)
CONTRACT_GRANT: NAS12-124
Distribution Limits
Public
Copyright
Work of the US Gov. Public Use Permitted.

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