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Atomic Oxygen Energy in Low Frequency Hyperthermal Plasma AshersExperimental and analytical analysis of the atomic oxygen erosion of pyrolytic graphite as well as Monte Carlo computational modeling of the erosion of Kapton H (DuPont, Wilmington, DE) polyimide was performed to determine the hyperthermal energy of low frequency (30 to 35 kHz) plasma ashers operating on air. It was concluded that hyperthermal energies in the range of 0.3 to 0.9 eV are produced in the low frequency air plasmas which results in texturing similar to that in low Earth orbit (LEO). Monte Carlo computational modeling also indicated that such low energy directed ions are fully capable of producing the experimentally observed textured surfaces in low frequency plasmas.
Document ID
20150000318
Document Type
Technical Memorandum (TM)
Authors
Banks, Bruce A. (Science Applications International Corp. Cleveland, OH, United States)
Miller, Sharon K R. (NASA Glenn Research Center Cleveland, OH United States)
Kneubel, Christian A. (BAB Technology, LLC Olmsted Township, OH, United States)
Date Acquired
January 12, 2015
Publication Date
November 1, 2014
Subject Category
Plasma Physics
Aircraft Design, Testing and Performance
Report/Patent Number
E-18991
NASA/TM-2014-218412
GRC-E-DAA-TN17641
Funding Number(s)
CONTRACT_GRANT: NNC12BA01B
WBS: WBS 686034.01.03.05
Distribution Limits
Public
Copyright
Public Use Permitted.
Keywords
Oxygen atoms
Plasmas (physics)

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